The effect of the crystal plane orientation on the friction-induced nanofabrication was mainly attributed to the different mechanical AZD7762 in vitro behaviors and bond structures of the various www.selleckchem.com/screening/chemical-library.html silicon crystal planes. The main conclusions can be summarized as below. (1) Friction-induced nanofabrication can be realized on Si(100), Si(110), and Si(111) surfaces, respectively. The crystal plane orientation has a significant
effect on the hillock formation on silicon surface. Under the same loading condition, the highest hillock was generated on Si(100), while the lowest hillock was formed on Si(111) either in air or in vacuum. (2) The mechanical performance of silicon shows a strong effect on the hillock formation on various silicon crystal planes. The crystal plane with the lower elastic modulus can lead to larger pressed volume, which facilitates more deformation in silicon matrix and higher hillock. (3) The structures of Si-Si bonds play a key role in the hillock formation on various silicon
crystal planes. High density of dangling bonds can cause much instability, facilitating the formation of more amorphous silicon and high hillock during nanoscratching. Acknowledgment The authors are grateful for the financial support from the National Basic Research Program (2011CB707604), Natural Science Foundation of China (90923017 and 51175441). References 1. Tanaka M: An industrial and applied review of new Glutamate dehydrogenase MEMS Lazertinib devices features. Microelectron Eng 2007, 84:1341–1344.CrossRef 2. Ko WH: Trends and frontiers of MEMS. Sens Actuators A 2007, 136:62–67.CrossRef 3. Cui Z: Micro-nanofabrication
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